细径金刚石线锯锯缝内切削液流场仿真研究

陈佳虎; 葛培琪

doi:10.13394/j.cnki.jgszz.2023.0235

细径金刚石线锯锯缝内切削液流场仿真研究

doi: 10.13394/j.cnki.jgszz.2023.0235

陈佳虎¹,
葛培琪^{1, 2, ,}

1.
山东大学机械工程学院, 济南 250061
2.
山东大学, 高效洁净机械制造教育部重点实验室, 济南 250061

基金项目: 国家自然科学基金资助项目(52175418)；山东省重大科技创新工程(2022CXGC010201)。

详细信息

通讯作者:
葛培琪，男，1963年生，教授。主要研究方向：金刚石线锯技术。E-mail: pqge@sdu.edu.cn

中图分类号: TG58; TG74; O357
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出版历程
- 收稿日期: 2023-11-07
- 修回日期: 2023-12-21
- 录用日期: 2024-01-16
- 网络出版日期: 2024-01-16
- 刊出日期: 2024-12-06

Simulation study of cutting fluid flow field in kerf of fine diameter diamond wire saw

CHEN Jiahu¹,
GE Peiqi^{1, 2
, ,}

1.
School of Mechanical Engineering, Shandong University, Jinan 250061, China
2.
Key Laboratory of High Efficiency and Clean Mechanical Manufacture of Ministry of Education, Shandong University, Jinan 250061, China

摘要

摘要: 随着工件大尺寸化及锯丝细线化，锯切加工过程中的锯缝越来越深且窄，切削液在锯切过程中无法充分发挥作用，对切片质量影响较大。基于计算流体力学（computational fluid dynamics，CFD）数值模拟，通过建立CFD锯缝模型，对金刚石线锯锯切加工材料时锯缝内切削液流场进行分析研究。仿真分析发现：在小尺寸锯缝内，随着走丝速度增大至25 m/s，切削液更能充分进入锯缝，在锯丝与工件接触区域及非接触区域充满液体后，接触区域流体压力在0.1790 MPa左右，非接触区域流体压力在0.1590 MPa左右；切削液黏度和表面张力在一定范围内的降低，有利于保证锯缝内切削液的相对饱和与稳定，同时可以使锯缝内切削液压力分布更为稳定。
- 金刚石线锯 /
- 计算流体力学 /
- 小尺寸锯缝 /
- 切削液流场
Abstract: Objectives: Electroplated diamond wire saws are widely used in the field of slicing hard and brittle materials such as monocrystalline silicon and sapphire. Cutting fluid should give full play to its role in the sawing process, which is conducive to the improvement of wafer quality. As the size of the wafer increases and the diameter of the wire saw decreases, the kerf in the sawing process becomes deeper and narrower, and the cutting fluid cannot enter the kerf in large quantities, resulting in worse lubrication and cooling effects during the sawing process, which leads to the decline of the surface quality of the wafer. Based on computational fluid dynamics (CFD) numerical simulation methods, the cutting fluid flow field in the cutting seam of the diamond wire saw was analyzed and studied. Methods: In this paper, based on CFD numerical simulation methods, the cutting fluid flow field in the sawing seam of the diamond wire saw is analyzed and studied. Firstly, according to the actual situation of the diamond wire saw cutting process, a 3D simulation geometric model is established based on the liquid supply mode, where cutting fluid flows along the sawing wire and is brought into the sawing area by the motion of the sawing wire. Heat transfer is not considered in this study, and the cutting fluid is assumed to be a viscous incompressible fluid. The governing equations of fluid flow include the continuity equation and the momentum equation. It is found from the equations that the main factors affecting the flow field distribution of cutting fluid in the kerf are wire speed and cutting fluid density. By calculating Reynolds number and Weber number, the fluid model studied in this paper is selected as the Transition SST model. The VOF method is determined to characterize the fluid state of cutting fluid in the saw joint, and the CSF model is introduced into the VOF method to characterize the influence of surface tension. Considering the influence of physical properties of cutting fluid, the density, viscosity, surface tension, and wall contact angle of cutting fluid are measured experimentally. The momentum equation is solved by a pressure-based solver, the continuity equation is solved by implicit time discretization, and the PISO method is used for pressure-velocity coupling. Result: With the increase of chip size and the decrease of wire saw diameter, the size of the saw seam is getting smaller and smaller. The main fluid entering the saw seam is shear flow, and the main factor affecting the fluid motion state is the wire speed. Under the condition of small-size sawing, when the wire speed is low (v_w≤25 m/s), both the contact area and the non-contact area of the saw wire in the sawing joint are not completely filled with liquid, and the liquid volume fraction in the contact area is < 100%, with an air layer in the area. With the increase of wire speed, more and more cutting fluid enters the sawing joint. With the increase of wire speed, more and more cutting fluid enters the saw seam. When v_w>25 m/s, both the contact area and the non-contact area are filled with liquid. The cutting fluid pressure in the saw seam increases with the increase of wire speed on both the contact area side and the non-contact area side, and the pressure difference on both sides also increases generally. The pressure distribution on both sides becomes more stable. After both sides of the saw seam are filled with liquid, the pressure on one side of the contact area is about 0.1790 MPa, and the pressure on one side of the non-contact area is about 0.1590 MPa. With the gradual reduction of the viscosity and surface tension of the cutting fluid, the cutting fluid gradually fills the saw joint. Howver, when the viscosity and surface tension of the cutting fluid are too small, the cutting fluid entering the saw joint will tend to decrease. The cutting fluid pressure in the saw seam increases with the decrease of the cutting fluid viscosity and surface tension in both the contact area and the non-contact area, and the pressure distribution becomes more stable. However, when the viscosity and the surface tension are too small, the pressure will also fluctuate. Under the physical properties of the cutting fluid C, with a density of 872.5 kg·m⁻³, viscosity of 1.15 mPa·s and surface tension of 34.02 mN·m⁻¹, the pressure distribution of the cutting fluid on the contact area side and the non-contact area side is more stable. The maximum pressure on the contact area side is about 0.0169 MPa, and the maximum pressure on the non-contact area side is about 0.0132 MPa. Conclusions: (1) Under small sawing sizes, when the wire speed is low, the cutting fluid is difficult to fully enter the sawing area to play its role. With the increase of the wire speed (v_w>25 m/s), the contact area and non-contact area between the saw wire and the workpiece are gradually filled with liquid, and the cutting fluid pressure and pressure difference between the contact area and the non-contact area show an overall increasing trend. When the contact area and non-contact area are full of cutting fluid, the cutting fluid pressure distribution in the saw joint is relatively stable, with the pressure in the contact area being about 0.1790 MPa and the pressure in the non-contact area being about 0.1590 MPa. (2) The reduction of liquid viscosity and surface tension within a certain range is conducive to ensuring the relative saturation and stability of the cutting fluid in the saw joint, and at the same time, it can make the pressure distribution of the cutting fluid in the saw joint more stable. A comprehensive comparison of the physical properties of the 5 groups of cutting fluids shows that the physical properties of the cutting fluid C during the diamond line saw cutting process are more conducive to its entry into the saw joint.
- diamond wire saw /
- computational fluid dynamics /
- small size kerf /
- cutting fluid flow field

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图 1 锯缝流场仿真几何模型

Figure 1. Geometric model of kerf flow field simulation

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图 2 仿真网格示意图

Figure 2. Schematic diagram of simulation grid

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图 3 锯缝不同位置示意图

Figure 3. Diagram of different positions of kerf

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图 4 不同走丝速度下锯缝内切削液体积分数云图

Figure 4. Integral number cloud map of cutting fluid in kerf at different wire speed

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图 5 锯丝锯切工件示意图

Figure 5. Schematic diagram of wire sawing workpiece

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图 6 不同走丝速度下锯丝与工件接触区域切削液压力变化曲线

Figure 6. Curve of cutting fluid pressure in contact area between saw wire and workpiece at different wire speed

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图 7 不同走丝速度下锯丝与工件非接触区域切削液压力变化曲线

Figure 7. Curve of cutting fluid pressure in non-contact area between saw wire and workpiece at different wire speed

下载: 全尺寸图片幻灯片

图 8 不同切削液物理属性下锯缝内切削液体积分数云图

Figure 8. Integral number cloud map of cutting fluid in kerf under different physical properties of cutting fluid

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图 9 不同切削液物理属性下锯丝与工件接触区域切削液压力变化曲线

Figure 9. Curve of cutting fluid pressure in contact area between saw wire and workpiece under different physicalproperties of cutting fluid

下载: 全尺寸图片幻灯片

图 10 不同切削液物理属性下锯丝与工件非接触区域切削液压力变化曲线

Figure 10. Curve of cutting fluid pressure in non-contact area between saw wire and workpiece under different physical properties of cutting fluid

下载: 全尺寸图片幻灯片

表 1 锯缝流场仿真几何模型参数

Table 1. Parameters of geometrical model for kerf flow field simulation

参数	取值
锯缝长度 l / mm	210
芯线直径 d_w / μm	36
锯缝宽度 D_w / μm	60
锯丝张紧力 F / N	5.8

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表 2 网格独立性验证结果

Table 2. Results of grid independence verification

网格数量 N	压力 P / Pa	相对误差 S / %
3 518 680	9 000	—
4 286 064	9 300	3.33
5 581 660	9 150	1.67

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表 3 切削液物理属性

Table 3. Physical properties of cutting fluid

切削液	密度 ρ/(kg·m⁻³)	黏度 Μ/(mPa·s)	表面张力 γ/(mN·m⁻¹)	与单晶硅表面接触角θ₁/(°)	与锯丝表面接触角θ₂/(°)
A	840.0	1.26	38.57	30	51
B	850.5	1.20	36.06	27	37
C	872.5	1.15	34.02	20	33
D	900.3	1.12	33.08	13	21
E	921.5	1.08	30.35	11	13

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表 4 边界条件

Table 4. Boundary conditions

区域	类型	参数
入口	速度入口	速度为1.5 m/s，面积为1.5 mm × 0.4 mm
出口	压力出口	表面压力为0
工件外表面	固定壁面	无滑移
锯缝内表面	固定壁面	无滑移
锯丝表面	移动壁面	无滑移，速度为10～30 m/s

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