Experimental study on normal force of cutting sapphire with multi-wire swing reciprocating wire saw
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摘要:
多线摇摆往复式线锯切割加工是目前将蓝宝石晶棒切割成晶圆衬底的主要加工方法，加工过程中法向切割力是反映加工过程稳定性的重要指标。测量了多线摇摆往复式线锯切割蓝宝石晶棒过程中产生的法向力Fn，跟踪了晶棒不同位置和不同切割深度下法向力的变化规律，以法向力变化幅值ΔFn为指标，探究各种工艺参数对加工过程稳定性的影响。试验结果表明：法向力Fn与线锯的往复运动、工件的摇摆运动有明确的对应关系，晶棒前端的ΔFn与中后端的有明显的不同。线速度vs、最大摇摆角度θmax、单片耗线量Md、张紧力Fw、总切割时间T等工艺参数对ΔFn有着不同的影响。ΔFn的波动程度与线锯磨损有着密切的关系。
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关键词:
- 多线摇摆往复式线锯切割 /
- 蓝宝石 /
- 法向力 /
- 磨损 /
- 加工稳定性
Abstract:Multi-wire swing reciprocating sawing technology is the main machining method used to cut sapphire crystal bars into wafer substrates, while normal force is an important index that reflects the processing stability. In this paper, the normal force (Fn) during multi-wire swing reciprocating wire saw cutting sapphire crystal bars was measured, and the change in normal force at different positions and cutting depths of the sapphire crystal bars was tracked. The influence of various process parameters on the stability of the machining process was tracked by using the rangeability of normal force Fn as the index. The experimental results show that Fn is closely correlated with the reciprocating motion of the wire saw and the rocking motion of the workpiece, and ΔFn in the front of the sapphire crystal bar is significantly different from that in the middle and back. Process parameters such as the wire saw speed（vs）, maximum swing angle (θmax), single piece wire consumption (Md), tensioning force (Fw), and total cutting time (T) have different effects on ΔFn. The fluctuation degree of ΔFn is closely related to the wear of the wire saw.
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图 6 晶棒不同位置测力区域对Δ$ {F}_{\mathrm{n}} $的影响
Figure 6. The influence of the wire net position on the Δ$ {F}_{\mathrm{n}} $
图 7 线速度对Δ$ {F}_{\mathrm{n}} $的影响
Figure 7. The influence of the speed of wire saw on Δ$ {F}_{\mathrm{n}} $
图 8 最大摇摆角度对Δ$ {F}_{\mathrm{n}} $的影响
Figure 8. The influence of maximum swing angle on Δ$ {F}_{\mathrm{n}} $
图 9 单片耗线量对Δ$ {F}_{\mathrm{n}} $的影响
Figure 9. The influence of single piece wire consumption on Δ$ {F}_{\mathrm{n}} $
图 10 张紧力对Δ$ {F}_{\mathrm{n}} $的影响
Figure 10. The influence of tensioning force on Δ$ {F}_{\mathrm{n}} $
图 11 总切割时间对Δ$ {F}_{\mathrm{n}} $的影响
Figure 11. The influence of total cutting time on Δ$ {F}_{\mathrm{n}} $
图 12 切割前后线锯的微观形貌
Figure 12. The microscopic appearance of the wire saw before and after cutting
表 1 工艺参数
Table 1. Technological parameter
试验
序号线锯稳定切割
速度 Vs/（m·s−1）最大摇摆
角度
θmax/ (°)张紧力
Fw
/N单片耗
线量Md
/（m·wafer−1)总切割时间
T/min1 25 10 45 18.9 360 2 25 10 45 15.8 360 3 25 10 45 12.6 360 4 25 10 45 18.9 540 5 25 5 45 18.9 540 6 25 0 45 18.9 540 7 25 10 40 18.9 540 8 25 10 35 18.9 540 9 20 10 45 18.9 540 10 15 10 45 18.9 540 
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