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络合剂对316L不锈钢化学机械抛光效果的影响

陈国美 杜春宽 倪自丰 卞达 王浩 章平 张鑫

陈国美, 杜春宽, 倪自丰, 卞达, 王浩, 章平, 张鑫. 络合剂对316L不锈钢化学机械抛光效果的影响[J]. 金刚石与磨料磨具工程, 2022, 42(6): 753-759. doi: 10.13394/j.cnki.jgszz.2022.0047
引用本文: 陈国美, 杜春宽, 倪自丰, 卞达, 王浩, 章平, 张鑫. 络合剂对316L不锈钢化学机械抛光效果的影响[J]. 金刚石与磨料磨具工程, 2022, 42(6): 753-759. doi: 10.13394/j.cnki.jgszz.2022.0047
CHEN Guomei, DU Chunkuan, NI Zifeng, BIAN Da, WANG Hao, ZHANG Ping, ZHANG Xin. Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel[J]. Diamond & Abrasives Engineering, 2022, 42(6): 753-759. doi: 10.13394/j.cnki.jgszz.2022.0047
Citation: CHEN Guomei, DU Chunkuan, NI Zifeng, BIAN Da, WANG Hao, ZHANG Ping, ZHANG Xin. Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel[J]. Diamond & Abrasives Engineering, 2022, 42(6): 753-759. doi: 10.13394/j.cnki.jgszz.2022.0047

络合剂对316L不锈钢化学机械抛光效果的影响

doi: 10.13394/j.cnki.jgszz.2022.0047
基金项目: 国家自然科学基金(52205196);江苏省高校自然科学研究项目(19KJB460023);江苏省高校青蓝工程(2021);无锡商业职业技术学院超精密加工与智能制造科研创新团队(XTD202107);无锡商业职业技术学院智能制造与服务协同创新中心科研平台(KYPT20309);无锡商业职业技术学院机器视觉工程技术中心科研平台(KYPT21304)。
详细信息
    作者简介:

    陈国美, 女, 1982年生, 博士,讲师。主要研究方向:超精密加工。Email:66537717@qq.com

    通讯作者:

    倪自丰, 男, 1981年生, 博士, 副教授。主要研究方向:超精密加工。Email: nizf@jiangnan.edu.cn

  • 中图分类号: TG58;TG732;TN27

Effect of complexing agent on chemical-mechanical polishing effect of 316L stainless steel

  • 摘要: 为提高316L不锈钢化学机械抛光(chemical-mechanical polishing,CMP)效率,针对络合剂类型对316L不锈钢加工效果的影响及影响机制进行研究。以材料去除率(material removal rate,MRR)和表面粗糙度(Ra)为指标,探究络合剂类型(甘氨酸、草酸和柠檬酸)及浓度对抛光效果的影响。利用电化学工作站、接触角测量仪和X射线光电子能谱仪(XPS)分析络合剂对316L不锈钢CMP加工影响机制。结果表明:当甘氨酸质量分数为0.2%时,能够同时获得较高的材料去除率和较低的Ra,分别为210 nm/min和1.613 nm。高浓度的络合剂对316L不锈钢材料去除率的抑制作用来源于络合剂增强了316L不锈钢表面耐蚀性,降低了表面氧化速度。XPS分析表明部分甘氨酸络合物会吸附于316L不锈钢表面产生缓蚀作用。

     

  • 图  1  316L不锈钢圆片

    Figure  1.  316L stainless steel disc

    图  2  抛光前后316L不锈钢表面形貌

    Figure  2.  As-received and polished surface morphology images of 316L stainless steel

    图  3  不同络合剂对316L不锈抛光效果的影响

    Figure  3.  Effects of different complexing agents on the processing effect of 316L stainless steel

    图  4  不同络合剂对316L不锈钢表面Tafel曲线的影响

    Figure  4.  Effect of different complexing agents on Tafel curve of 316L stainless steel

    图  5  不同络合剂对316L不锈钢表面接触角的影响

    Figure  5.  Effect of different complexing agents on surface contact angle of 316L stainless steel

    图  6  316L不锈钢表面的Fe2p,O1s和N1s光谱图

    Figure  6.  Fe2p, O1s and N1s spectra of 316L stainless steel surface

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出版历程
  • 收稿日期:  2022-04-13
  • 修回日期:  2022-05-19
  • 录用日期:  2022-05-26
  • 刊出日期:  2023-01-12

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