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Fe3O4特性对单晶SiC固相芬顿反应研磨丸片性能的影响

路家斌 曹纪阳 邓家云 阎秋生 胡达

路家斌, 曹纪阳, 邓家云, 阎秋生, 胡达. Fe3O4特性对单晶SiC固相芬顿反应研磨丸片性能的影响[J]. 金刚石与磨料磨具工程, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008
引用本文: 路家斌, 曹纪阳, 邓家云, 阎秋生, 胡达. Fe3O4特性对单晶SiC固相芬顿反应研磨丸片性能的影响[J]. 金刚石与磨料磨具工程, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008
LU Jiabin, CAO Jiyang, DENG Jiayun, YAN Qiusheng, HU Da. Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC[J]. Diamond & Abrasives Engineering, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008
Citation: LU Jiabin, CAO Jiyang, DENG Jiayun, YAN Qiusheng, HU Da. Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC[J]. Diamond & Abrasives Engineering, 2022, 42(2): 223-232. doi: 10.13394/j.cnki.jgszz.2022.0008

Fe3O4特性对单晶SiC固相芬顿反应研磨丸片性能的影响

doi: 10.13394/j.cnki.jgszz.2022.0008
详细信息
    作者简介:

    路家斌,男,1970 年生,博士、教授、博士研究生导师。主要研究方向:光电子/微电子硬脆材料超精密加工理论与技术、材料节能节材加工技术等。E-mail:lujiabin@gdut.edu.cn

  • 中图分类号: TG58; TH161

Effect of Fe3O4 characteristics on properties of solid-phase Fenton reaction lapping pellets for single-crystal SiC

  • 摘要: 为提高单晶SiC研磨加工质量和加工效率,制备固相芬顿反应研磨丸片,研究固相催化剂Fe3O4特性(粒径和质量分数)对研磨丸片的硬度、抗弯强度、气孔率、催化性能及其对单晶SiC研磨加工性能的影响。结果表明:随着Fe3O4粒径的增大,丸片的硬度和抗弯强度减小、气孔率增大、催化性能减弱,材料去除率MMRR从43.12 nm/min降到36.82 nm/min,表面粗糙度Ra从1.06 nm增大到3.72 nm。随着Fe3O4质量分数的增大,丸片的硬度和抗弯强度减小、气孔率增大、催化性能增强,MMRR从40.14 nm/min降到33.51 nm/min,表面粗糙度Ra先减小后增大,分别为3.25 nm、1.75 nm和1.88 nm。

     

  • 图  2  烧结温度曲线

    Figure  2.  Sintering temperature profile

    图  3  修整后研磨丸片表面形貌

    Figure  3.  Surface morphology of lapping pellet after trimming

    图  1  陶瓷结合剂研磨丸片制作工艺路线

    Figure  1.  Manufacturing process of vitrified bond lapping pellet

    图  4  研磨加工装置

    Figure  4.  Lapping process device

    图  5  研磨加工前SiC表面形貌

    Figure  5.  SiC surface morphology before lapping process

    图  6  Fe3O4粒径对研磨丸片物理性能的影响

    Figure  6.  Effect of Fe3O4 particle size on physical properties of lapping pellets

    图  7  Fe3O4粒径对研磨丸片表面形貌的影响

    Figure  7.  Effect of Fe3O4 particle size on surface morphology of lapping pellets

    图  8  Fe3O4质量分数对丸片物理性能的影响

    Figure  8.  Effect of Fe3O4 mass fraction on physical properties of lapping pellets

    图  9  Fe3O4质量分数对研磨丸片表面形貌的影响

    Figure  9.  Effect of Fe3O4 mass fraction on surface morphology of lapping pellets

    图  10  不同Fe3O4粒径下研磨液褪色过程

    Figure  10.  Fading process of lapping solution under different particle sizes of Fe3O4

    图  11  不同Fe3O4质量分数下研磨液褪色过程

    Figure  11.  Fading process of lapping solution under different Fe3O4 mass fraction

    图  12  Fe3O4粒径对MMRRRa的影响

    Figure  12.  Effect of Fe3O4 particle size on MMRR and Ra

    图  13  不同Fe3O4粒径丸片加工后的SiC表面形貌

    Figure  13.  Surface morphologies of SiC processed by pellets with different Fe3O4 particle sizes

    图  14  Fe3O4质量分数对MMRRRa的影响

    Figure  14.  Effect of Fe3O4 mass fraction on material removal rate and surface roughness

    图  15  不同Fe3O4质量分数丸片加工后的SiC表面形貌

    Figure  15.  Surface morphologies of SiC processed by pellets with different Fe3O4 mass fraction

    表  1  固相芬顿反应陶瓷结合剂研磨丸片的制备参数

    Table  1.   Preparation parameters of solid-phase Fenton reaction vitrified bond lapping pellets

    试验Fe3O4粒径 d / μmFe3O4质量分数 ω1 / %Al2O3质量分数 ω2 / %陶瓷结合剂质量分数 ω3 / %造孔剂质量分数 ω4 / %
    10.5, 1.0, 3.02941264
    21.025, 29, 3337, 41, 45264
    下载: 导出CSV

    表  2  研磨加工试验参数

    Table  2.   Lapping process parameters

    工艺参数 数值
    磨粒粒径 d2 / μm 1
    研磨时间 t / min 60
    研磨压力 p / N 20
    研磨盘转速 n1 / (r·min−1)200
    主轴转速 n2 / (r·min−1) 200
    研磨液流量 q / (mL·h−1)100
    下载: 导出CSV
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出版历程
  • 收稿日期:  2022-02-14
  • 修回日期:  2022-02-28
  • 录用日期:  2022-04-11
  • 刊出日期:  2022-05-27

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