SiC基底HFCVD金刚石薄膜摩擦磨损性能

王贺; 沈建辉; 刘鲁生; 闫广宇; 吴玉厚; 熊家骥; DANIELCristea

doi:10.13394/j.cnki.jgszz.2021.0206

SiC基底HFCVD金刚石薄膜摩擦磨损性能

doi: 10.13394/j.cnki.jgszz.2021.0206

王贺^{1, 2,},
沈建辉^{1, 2},
刘鲁生^3, ,,
闫广宇^{1, 2},
吴玉厚¹,
熊家骥³,
DANIELCristea⁴

1.
现代建筑工程装备与技术国际合作联合实验室，沈阳 110168
2.
沈阳建筑大学机械工程学院，沈阳 110168
3.
中国科学院金属研究所，沈阳材料科学国家研究中心，沈阳 110016
4.
布拉索夫特兰西瓦尼亚大学材料科学与工程学院，布拉索夫 500036，罗马尼亚

基金项目: 国家自然科学基金（51942507）；学科创新引智项目（D18017）；沈阳市科技局（18-400-6-05）；中央军委科技委项目（20-163-00-TS-006-002-11）；福建省-中科院STS计划配套项目（2020T3001）。

详细信息

作者简介:
王贺，男，1981年出生，副教授、硕士研究生导师。主要研究方向：硬脆材料加工技术。E-mail：wanghe9095@163.com

通讯作者:
刘鲁生，男，1979年生，硕士研究生导师、工程师。主要研究方向：薄膜材料制备装备及工艺开发。E-mail：lsliu@imr.ac.cn

中图分类号: TQ174.1
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出版历程
- 收稿日期: 2021-12-02
- 修回日期: 2022-03-12
- 录用日期: 2022-03-14
- 网络出版日期: 2022-07-13
- 刊出日期: 2022-07-13

Wear properties of HFCVD diamond films on SiC substrate

WANG He^{1, 2
,},
SHEN Jianhui^{1, 2},
LIU Lusheng^{3
, ,},
YAN Guangyu^{1, 2},
WU Yuhou¹,
XIONG Jiaji³,
DANIEL Cristea⁴

1.
Joint International Research Laboratory of Modern Construction Engineering Equipment and Technology, Shenyang 110168, China
2.
College of Mechanical Engineering, Shenyang Jianzhu University, Shenyang 110168, China
3.
Shenyang National Laboratory for Materials Science, Institute of Metal Research, Chinese Academy of Sciences, Shenyang 110016, China
4.
Materials Science and Engineering Faculty, Transilvania University of Brasov, Brasov 500036, Romania

摘要

摘要: 利用热丝化学气相沉积技术在碳化硅基底上制备微米金刚石薄膜、纳米金刚石薄膜和金刚石–石墨复合薄膜，采用扫描电子显微镜、原子力显微镜和拉曼光谱仪对不同金刚石薄膜的表面形貌和微观结构进行表征，通过摩擦磨损实验测试金刚石薄膜的摩擦系数并计算其磨损率，对比研究不同种类金刚石薄膜的摩擦磨损性能。结果表明：金刚石–石墨复合薄膜具有较好的摩擦磨损性能，薄膜表面粗糙度为53.8 nm，摩擦系数为0.040，和纳米金刚石薄膜（0.037）相当；金刚石–石墨复合薄膜的磨损率最低，为2.07×10⁻⁷ mm³·N⁻¹·m⁻¹。在相同实验条件下，同碳化硅基底的磨损率（9.89×10⁻⁵ mm³·N⁻¹·m⁻¹）和摩擦系数（0.580）相比，所有金刚石薄膜的磨损率和摩擦系数均有明显提升，说明在SiC基体表面沉积金刚石薄膜能够显著提高碳化硅材料在摩擦学领域的使役性能。
- 金刚石薄膜 /
- 碳化硅 /
- 石墨 /
- 摩擦磨损 /
- 化学气相沉积
Abstract: Micro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and Raman spectrometer. The friction coefficient and the wear rate of diamond films were measured by friction experiments. The friction and wear properties of diamond films were studied by comparing the experimental results. The results show that the diamond-graphite composite film has better friction and wear properties, the surface roughness of which is 53.8 nm. The friction coefficient (0.040) is similar to that of the nano-diamond film (0.037), while the wear rate is the lowest, 2.07×10⁻⁷ mm³·N⁻¹·m⁻¹. Compared with those of SiC substrate, the wear rate (9.89×10⁻⁵ mm³·N⁻¹·m⁻¹) and the friction coefficient (0.580) of the diamond films have been greatly improved, which indicates that depositing diamond on the surface of SiC substrate significantly improves the performance of the silicon carbide in the field of friction.
- diamond film /
- silicon carbide /
- graphite /
- friction and wear /
- hot filament chemical vapor deposition

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图 1 碳化硅和热丝布置图

Figure 1. Silicon carbide and hot filament layout

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图 2 金刚石薄膜表面形貌图

Figure 2. Morphologies of diamond films

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图 3 金刚石薄膜三维形貌图

Figure 3. 3D morphologies of diamond films

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图 4 金刚石薄膜的拉曼光谱图

Figure 4. Raman spectra of diamond films

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图 5 SiC基底和不同种类金刚石薄膜摩擦系数曲线图

Figure 5. Coefficients of friction of SiC substrate and diamond films

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图 6 金刚石薄膜和氮化硅球磨损率

Figure 6. Wear rates for diamond films and its counterpart SiN balls

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图 7 金刚石薄膜磨损后3D轮廓图

Figure 7. 3D profile of worn diamond films

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图 8 氮化硅陶瓷球磨损后形貌图

Figure 8. Morphology of worn counterpart SiN balls

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图 9 金刚石薄膜磨损后形貌

Figure 9. SEM images of the wear tracks

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表 1 金刚石薄膜沉积参数

Table 1. Deposition parameters of diamond film

参数	MCD	NCD	D/GC
甲烷流量 V_M /sccm^①	4	20	20
基底温度 θ_s / ℃	930±10	860±10	930±10
热丝数量 n	6	6	6
热丝直径 d_f / mm	0.5	0.5	0.5
热丝–基底间距 d / mm	8	8	8
腔室气压 p / Pa	1000	1000	1000
热丝温度 θ_f / ^oC	2600±50	2600±50	2600±50
沉积时间 t / h	3	3	3
氢气流量 V_H /sccm	400	400	400
注：① sccm为体积流量单位（standard cubic centimeter per minute），　表示每分钟流过的标准状况下的气体体积（以cm³计）。

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