Abstract: The sharpness of the tool cutting edge is one of the important factors affecting the quality of the product.To improve the quality of cutting edge and increase the processing efficiency,four different types of scaife,namely copper scaife,iron scaife,copper based tungsten carbide scaife and aluminum based silicon carbide scaife,are used in the experiments for an optimized selection.The surface topography and materiall removal rate of ground scaife,as well as edge radius and surface topography of single crystal diamond micro-tool are investigated for each experiment,respectively.The experimental results show that the better cutting edge,higher surface quality and quicker material removal rate could be achieved when using copper based tungsten carbide scaife,and the edge radius can be stabilized at less than 1 μm.It's also shown that tool quality is relatively good when processed by aluminum based silicon scaife,while using copper scaife and iron scaife could not ensure the integrity of single crystalline diamond.