Study on polishing zinc selenide wafer
-
摘要: 采用化学机械抛光(CMP)的方法,使用自主研发的氧化铝抛光液作为研磨介质,通过对硒化锌(ZnSe)晶片进行抛光实验,得出了氧化铝磨粒的粒度尺寸、抛光液的pH值、氧化剂种类及质量分数对ZnSe晶片表面状态和去除率的影响。实验结果表明:氧化铝抛光液适宜ZnSe晶片的抛光,采用质量分数15%的氧化铝抛光液(氧化铝粒度尺寸200 nm),加入质量分数3%的次氯酸钠浸泡24 h,抛光液的pH值为8,试验结果较佳,此时去除率可达2 μm/min,晶片表面平整无划痕,表面质量较理想。Abstract: Chemical mechanical polishing(CMP)method and self-made alumina polishing liquid were used to polish zinc selenide wafer.The polishing experiments were carried out for the influence of particle size of alumina polishing liquid,pH value,type and content of oxidizing agent on the surface state and removal rate of zinc selenide wafer.The results showed that alumina polishing liquid was suitable for the polishing and that the quality was better when the parameters were aluminum oxide particle size 200 nm(mass fraction of alumina 15%),soaked for 24 h with NaClO(mass fraction 3%)and pH value 8.The final removal rate was 2 μm/min and surface was smooth without scratches.
-
Key words:
- zinc selenide wafer /
- polishing /
- removal rate
点击查看大图
计量
- 文章访问数: 162
- HTML全文浏览量: 32
- PDF下载量: 12
- 被引次数: 0