Citation: | TANG Ailing, YUAN Zewei, TANG Meiling, WANG Ying. Effect of abrasive vibration on microstructure evolution and material removal of SiC CMP[J]. Diamond & Abrasives Engineering, 2024, 44(1): 109-122. doi: 10.13394/j.cnki.jgszz.2023.0053 |
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