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低温微磨料气射流加工的硬脆材料耐冲蚀性能对比

徐朋冲 孙玉利 张桂冠 康诗杰 卢文壮 孙业斌 左敦稳

徐朋冲, 孙玉利, 张桂冠, 康诗杰, 卢文壮, 孙业斌, 左敦稳. 低温微磨料气射流加工的硬脆材料耐冲蚀性能对比[J]. 金刚石与磨料磨具工程, 2024, 44(5): 665-674. doi: 10.13394/j.cnki.jgszz.2023.0220
引用本文: 徐朋冲, 孙玉利, 张桂冠, 康诗杰, 卢文壮, 孙业斌, 左敦稳. 低温微磨料气射流加工的硬脆材料耐冲蚀性能对比[J]. 金刚石与磨料磨具工程, 2024, 44(5): 665-674. doi: 10.13394/j.cnki.jgszz.2023.0220
XU Pengchong, SUN Yuli, ZHANG Guiguan, KANG Shijie, LU Wenzhuang, SUN Yebin, ZUO Dunwen. Comparison of erosion resistance of hard and brittle materials processed by low-temperature micro-abrasive gas jet[J]. Diamond & Abrasives Engineering, 2024, 44(5): 665-674. doi: 10.13394/j.cnki.jgszz.2023.0220
Citation: XU Pengchong, SUN Yuli, ZHANG Guiguan, KANG Shijie, LU Wenzhuang, SUN Yebin, ZUO Dunwen. Comparison of erosion resistance of hard and brittle materials processed by low-temperature micro-abrasive gas jet[J]. Diamond & Abrasives Engineering, 2024, 44(5): 665-674. doi: 10.13394/j.cnki.jgszz.2023.0220

低温微磨料气射流加工的硬脆材料耐冲蚀性能对比

doi: 10.13394/j.cnki.jgszz.2023.0220
基金项目: 国家自然科学基金面上项目(52075254)。
详细信息
    作者简介:

    孙玉利,男,1970年生,教授、博士生导师。主要研究方向:精密超精密加工技术与装备、现代表面工程技术。E-mail:sunyuli@nuaa.edu.cn

  • 中图分类号: TG73; TG58

Comparison of erosion resistance of hard and brittle materials processed by low-temperature micro-abrasive gas jet

  • 摘要: 低温微磨料气射流加工硬脆材料时,其变脆易被冲蚀去除。对碳化硅(SiC)、氮化硅(Si3N4)、钇稳定氧化锆(YSZ)、99氧化铝(99 Al2O3)、石英玻璃5种硬脆材料进行低温微磨料气射流加工对比实验,探究加工压力、冲击加工角度及加工次数等工艺参数对5种硬脆材料的冲蚀去除率、低温冲蚀槽三维形貌及表面轮廓的影响,优选出低温下耐冲蚀性能良好的硬脆材料。结果表明:随着加工压力和加工次数增加,5种材料的冲蚀去除率都不断增大;随着冲击加工角度变化,5种材料的低温冲蚀槽体积也在变化,并在加工角度为90°的垂直加工角度附近时达到最大;在相同的加工工艺参数下,Si3N4材料的冲蚀去除率最小,其最大低温冲蚀槽深度只有20 μm,SiC材料的与其相差不大,YSZ和99 Al2O3的冲蚀去除率依次增大,但石英玻璃材料的冲蚀去除率最大且远大于其他4种材料的。同时,Si3N4的低温冲蚀槽槽形不明显,且其表面较平整,去除量最小,因而耐冲蚀性能最佳。

     

  • 图  1  平均粒径为25 μm的Al2O3磨料SEM形貌

    Figure  1.  SEM morphology of Al2O3 abrasive with an average particle size of 25 μm

    图  2  低温微磨料气射流加工装置

    Figure  2.  Low temperature micro abrasive air jet machining device

    图  3  实验加工区域示意图

    Figure  3.  Schematic diagram of experimental processing area

    图  4  微磨料气射流加工示意图

    Figure  4.  Schematic diagram of micro-abrasive gas jet machining

    图  5  5种材料低温冲蚀槽的体积随加工压力、冲击加工角度及加工次数的变化趋势

    Figure  5.  Variation trend of volumes of low-temperature erosion grooves for five materials with processing pressure, impact processing angle and processing frequency

    图  6  5种材料槽的3D光学轮廓

    Figure  6.  3D optical profiles of five material slots

    图  7  低温微磨料气射流加工的5种材料冲蚀轮廓对比

    Figure  7.  Comparison of erosion contours of five materials processed by low temperature micro abrasive air jet

    表  1  5种材料的部分力学性能[16]

    Table  1.   Partial mechanical properties of five materials[16]

    材料名称抗弯强度

    σ / MPa
    断裂韧性
    KIC / (MPa·m1/2)
    石英玻璃 61.2 0.8
    YSZ 646.0 7.5
    99 Al2O3 370.0 5.3
    Si3N4 930.0 6.8
    SiC 500.0 5.5
    下载: 导出CSV

    表  2  实验中固定的加工参数

    Table  2.   Fixed processing parameters in the experiment

    实验参数类型或取值
    气射流喷嘴直径 dN / μm 460
    液氮射流喷嘴直径 d2 / mm 3
    气射流和液氮喷嘴夹角 θ1 / (°) 10
    实验气体 干燥的压缩空气
    液氮压力 p1 / MPa 0.2
    试样表面温度 T / K 77
    磨料粒径 d50 / μm 25
    磨料种类 Al2O3
    加工速度 vp / (mm·s−1) 5
    加工距离 d / mm 2
    下载: 导出CSV

    表  3  全因子实验的参数设计

    Table  3.   Parameter design of full factor experiment

    实验参数水平数取值
    冲击加工角度 α / (°) 4 30,50,70,90
    加工压力 p / MPa 3 0.2,0.4,0.6
    加工次数 n / 次 4 1,3,5,7
    下载: 导出CSV
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出版历程
  • 收稿日期:  2023-10-12
  • 修回日期:  2023-11-10
  • 录用日期:  2023-11-22
  • 刊出日期:  2024-10-01

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