Study on Physicochemical Properties and Removal Mechanism of SiC Ceramics Processed by Femtosecond Laser
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摘要: 硬脆材料超快激光加工可有效抑制加工损伤,获得加工质量和效率的平衡。本文采用飞秒激光,在不同能量密度和脉冲数下对碳化硅陶瓷进行加工,探究激光参数对表面形貌特征、化学组分和微孔质量的影响,分析了表面微观结构的演变规律和材料去除过程。结果表明,单脉冲加工碳化硅陶瓷表面形成沸腾区和熔化区,计算得到形成特征区的阈值能量分别为3.779 J/cm2、0.86 J/cm2;碳化硅陶瓷的去除过程是光热作用和光化学作用先后作用的结果,在温度较高的中心区域的作用机制是材料的蒸发作用,低温区域则是材料的热分解和氧化;微孔直径和烧蚀深度随着能量密度和脉冲数量的增加而增加。本研究从材料理化学特性变化角度进一步完善了碳化硅陶瓷飞秒激光加工机理,为碳化硅陶瓷零部件的高效精密加工应用提供了理论参考。Abstract: Ultrafast laser processing of hard and brittle materials can effectively suppress processing damage and obtain a balance of processing quality and efficiency. In this paper, a femtosecond laser was used to process silicon carbide ceramics at different energy densities and pulse numbers to investigate the effects of laser parameters on surface morphological features, chemical components and microporous quality, and to analyze the evolution of surface microstructure and material removal processes. The results show that the boiling and melting zones are formed on the surface of silicon carbide ceramics by single-pulse processing, and the threshold energies for the formation of characteristic zones are calculated to be 3.779 J/cm2 and 0.86 J/cm2, respectively; the removal process of silicon carbide ceramics is the result of photothermal and photochemical effects successively, and the mechanism of action in the central region with higher temperature is the evaporation of the material, while the low temperature region is the thermal decomposition of the material The microporous diameter and ablation depth increase with the increase of energy density and number of pulses. This study further improves the mechanism of femtosecond laser processing of silicon carbide ceramics from the perspective of material physiochemical property changes, and provides a theoretical reference for efficient and precise processing applications of silicon carbide ceramic parts.
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Key words:
- SiC Ceramics /
- Femtosecond laser /
- Ablation characteristics /
- Removal process /
- Microporous quality
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