TiN<sub>0.3</sub>/AlN复合烧结界面扩散现象

邹芹; 孙俊绒; 李艳国; 罗永安

doi:10.13394/j.cnki.jgszz.2022.0222

TiN_0.3/AlN复合烧结界面扩散现象

doi: 10.13394/j.cnki.jgszz.2022.0222

邹芹^{1, 2},
孙俊绒²,
李艳国^2, ,,
罗永安²

1.
燕山大学机械工程学院, 河北秦皇岛 066004
2.
燕山大学，亚稳材料制备技术与科学国家重点实验室, 河北秦皇岛 066004

基金项目: 河北省高等学校科学技术研究项目资助项目(ZD2021099)

详细信息

通讯作者:
李艳国，男， 1978年生，副研究员。主要从事陶瓷及其复合材料研究。E-mail：lyg@ysu.edu.cn

中图分类号: TB383.3
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- 被引次数: 0
出版历程
- 收稿日期: 2022-12-19
- 修回日期: 2023-02-04
- 录用日期: 2023-02-09
- 网络出版日期: 2023-12-07
- 刊出日期: 2023-10-20

Interfacial diffusion in TiN_0.3/AlN composite

ZOU Qin^{1, 2},
SUN Junrong²,
LI Yanguo^{2
, ,},
LUO Yong`an²

1.
School of Mechanical Engineering, Yanshan University, Qinhuangdao 066004, Hebei, China
2.
Metastable Materials Science and Technology State Key Laboratory, Yanshan University, Qinhuangdao 066004, Hebei, China

Funds: Projects(ZD2021099) supported by the Science and Technology Project of Hebei Education Department

摘要

摘要: 为研究TiN_0.3/AlN复合烧结体中两相界面区域的N原子的扩散现象，通过机械合金化方法制备出非化学计量比TiN_0.3，采用放电等离子体烧结技术分层及复合烧结TiN_0.3/AlN复合材料，采用金相、XRD、SEM、EDS及TEM等分析表征TiN_0.3/AlN复合材料的物相组成、元素分布和组织形貌。结果表明： AlN中的N通过空位扩散机制向TiN_0.3中扩散，其扩散程度逐渐减弱；与AlN接触的TiN_0.3部分由于吸收了来自AlN中的N使成分接近正常比例的TiN，而远离界面处的部分则接近TiN_0.3的成分；在两相结合区域有宽度在1 nm以下的非晶层，其电子衍射斑点出现纵向伸长，产生共格，说明六方结构的AlN晶格向TiN晶格畸变，形成面心立方结构的TiN_0.3/AlN。
- TiN/AlN复合材料 /
- 放电等离子体烧结 /
- 界面扩散 /
- 共格
Abstract: In recent years, extensive research has been conducted on nano-multilayer films of TiN/AlN system. However, there are few reports on its bulk composites. In this study, non-stoichiometric TiN_0.3 was prepared by mechanical alloying, then TiN_0.3/AlN composites were fabricated through spark plasma sintering (SPS) utilizing both layered and mixed sintering techniques. The phase composition, element distribution and microstructure of TiN_0.3/AlN composites were characterized by metallography, XRD, SEM, EDS and TEM, to study the diffusion of N atoms in the interface region of TiN_0.3/AlN composites. The results show that N in AlN diffuses into TiN_0.3 through a vacancy diffusion mechanism, The area of TiN_0.3 in contact with AlN absorbs N from AlN to make the composition close to the normal proportion of TiN, while the area "far away" from the interface is close to the component of TiN_0.3, and its diffusion degree weakens gradually. In the two-phase bonding region, there is a thin amorphous layer whose width is less than 1 nm. The electron diffraction pattern elongates longitudinally and produces coherent lattice. The AlN lattice of hexagonal structure is distorted to TiN lattice, forming TiN_0.3/AlN with a face-centered cubic structure.
- TiN/AlN composite /
- SPS /
- interface diffusion /
- cohere

HTML全文

图 1 TiN_0.3/AlN分层烧结界面的金相图：(a)~(b) 未腐蚀；(c)~(d) 腐蚀

Figure 1. Metallurgical microscope images of TiN_0.3/AlN by layered sintering: (a)(b) no corrosion, (c)(d) after corrosion

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图 2 TiN_0.3/AlN分层烧结界面的SEM图

Figure 2. SEM images of TiN_0.3/AlN by layed sintering

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图 3 TiN_0.3/AlN分层烧结体界面各元素分布（a）分布范围；（b）Ti元素；（c）Al元素；（d）N元素

Figure 3. EDS mapping of TiN_0.3/AlN: (a) Distribution range; (b) Ti element; (c) Al element; (d) N element

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图 4 TiN_0.3/AlN分层烧结体界面各元素分布图：(a) 扫描范围；(b) Ti元素；(c)Al元素；(d) N元素

Figure 4. EDS mapping of TiN_0.3/AlN: (a) Scan range; (b) Ti element; (c) Al element; (d) N element

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图 5 TiN_0.3/AlN混合烧结前后的XRD图

Figure 5. XRD of mixed TiN_0.3/AlN before and after sintering

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图 6 TiN_0.3/AlN混合烧结体中垂直界面的线扫描结果

Figure 6. Line scanning results of vertical interface in sintered TiN_0.3/AlN mixture

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图 7 TiN_0.3/AlN混合烧结体界面的SEM图

Figure 7. SEM images of TiN_0.3/AlN

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图 8 TiN_0.3/AlN混合烧结体相界面EDS线扫描

Figure 8. EDS line scanning results of TiN_0.3/AlN

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图 9 TiN_0.3/AlN相界面处的高分辨电子显微像及电子衍射图

Figure 9. TEM and electron diffraction patterns at TiN_0.3/AlN interface

(a) TEM; (b) SED pattern of AlN; (c) SED pattern of TiN

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图 10 TiN_0.3/AlN复合材料高分辨电子显微像：(a)晶格条纹像；(b)傅里叶转换

Figure 10. High resolution electron microscopic images of TiN_0.3/AlN composites: (a) lattice fringe image; (b) Fourier transform

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表 1 TiN和AlN的晶面间距

Table 1. Space between crystal planes of TiN and AlN

类型	(hkl)	d / nm
TiN	100	0.424
	111	0.244
	200	0.213
	220	0.151
	211	0.173
	222	0.122
AlN	100	0.270
	002	0.249
	101	0.237
	102	0.183
	110	0.156
	103	0.141
	112	0.132

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