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均一亚微米级氧化铈抛光粉的制备

戴蒙姣 陈国美 倪自丰 章平 钱善华 卞达

戴蒙姣, 陈国美, 倪自丰, 章平, 钱善华, 卞达. 均一亚微米级氧化铈抛光粉的制备[J]. 金刚石与磨料磨具工程, 2022, 42(4): 428-432. doi: 10.13394/j.cnki.jgszz.2021.0117
引用本文: 戴蒙姣, 陈国美, 倪自丰, 章平, 钱善华, 卞达. 均一亚微米级氧化铈抛光粉的制备[J]. 金刚石与磨料磨具工程, 2022, 42(4): 428-432. doi: 10.13394/j.cnki.jgszz.2021.0117
DAI Mengjiao, CHEN Guomei, NI Zifeng, ZHANG Ping, QIAN Shanhua, BIAN Da. Preparation of homogeneous sub-micron cerium oxide polishing powder[J]. Diamond &Abrasives Engineering, 2022, 42(4): 428-432. doi: 10.13394/j.cnki.jgszz.2021.0117
Citation: DAI Mengjiao, CHEN Guomei, NI Zifeng, ZHANG Ping, QIAN Shanhua, BIAN Da. Preparation of homogeneous sub-micron cerium oxide polishing powder[J]. Diamond &Abrasives Engineering, 2022, 42(4): 428-432. doi: 10.13394/j.cnki.jgszz.2021.0117

均一亚微米级氧化铈抛光粉的制备

doi: 10.13394/j.cnki.jgszz.2021.0117
详细信息
    通讯作者:

    倪自丰,男,1981年生,博士、副教授。主要研究方向:超精密加工。E-mail: nizf@jiangnan.edu.cn

  • 中图分类号: TG73; TB383

Preparation of homogeneous sub-micron cerium oxide polishing powder

  • 摘要: 为得到均一的亚微米级二氧化铈(CeO2)抛光粉,以六水合硝酸铈(Ce(NO3)3·6H2O)为原料,以醇-水混合溶液为溶剂,采用溶剂热法合成CeO2。改变Ce3+浓度和醇-水体积比,利用X射线衍射仪(XRD)、激光粒度分布仪、扫描电子显微镜(SEM)对CeO2的物相组成和形貌特征进行表征,分析CeO2粒子的形成过程。将合成的CeO2用于6H-SiC晶片Si面的化学机械抛光(chemical mechanical polishing,CMP),利用原子力显微镜(atomic force microscopy, AFM)和电子天平得出CeO2的抛光性能。结果表明:Ce3+浓度为0.10 mol/L,醇-水体积比为3∶1时合成的CeO2的形貌规则、晶粒尺寸适中且粒度分布均匀。采用其抛光后,晶片表面粗糙度Ra为0.243 nm,材料去除速率dMRR为287 nm/h。合成的CeO2适用于化学机械抛光。

     

  • 图  1  煅烧前、后CeO2-0.10的XRD图

    Figure  1.  XRD patterns of CeO2-0.10 before and after calcination

    图  2  不同CeO2的XRD图

    Figure  2.  XRD patterns of different CeO2

    图  3  不同CeO2的SEM图

    Figure  3.  SEM images of different CeO2

    图  4  不同CeO2的粒度分布图

    Figure  4.  Particle size distribution of different CeO2

    图  5  CeO2的SEM图

    Figure  5.  SEM image of CeO2

    图  6  CeO2的粒度分布图

    Figure  6.  Particle size distribution of CeO2

    图  7  抛光前后晶片的表面形貌

    Figure  7.  Surface morphology of wafer before and after polishing

    表  1  不同CeO2的半高宽、衍射角和晶粒尺寸

    Table  1.   FWHM, diffraction angle and crystallite size of different CeO2

    样品半高宽
    θFWHM / rad
    衍射角
    2θ / rad
    晶粒尺寸
    D / nm
    CeO2-0.050.0060.24824
    CeO2-0.100.0080.24918
    CeO2-0.150.0090.24915
    下载: 导出CSV
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出版历程
  • 录用日期:  2022-01-09
  • 收稿日期:  2021-11-25
  • 修回日期:  2021-12-30

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