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光学非球面超精密切削的在位测量及补偿加工

张亮 郭曦鹏 王定文 徐闻 刘坚 黄帅 尹韶辉

张亮, 郭曦鹏, 王定文, 徐闻, 刘坚, 黄帅, 尹韶辉. 光学非球面超精密切削的在位测量及补偿加工[J]. 金刚石与磨料磨具工程, 2022, 42(1): 18-22. doi: 10.13394/j.cnki.jgszz.2021.0106
引用本文: 张亮, 郭曦鹏, 王定文, 徐闻, 刘坚, 黄帅, 尹韶辉. 光学非球面超精密切削的在位测量及补偿加工[J]. 金刚石与磨料磨具工程, 2022, 42(1): 18-22. doi: 10.13394/j.cnki.jgszz.2021.0106
ZHANG Liang, GUO Xipeng, WANG Dingwen, XU Wen, LIU Jian, HUANG Shuai, YIN Shaohui. On-machine measurement and compensation machining for ultra-precision cutting of optical aspheric surface[J]. Diamond &Abrasives Engineering, 2022, 42(1): 18-22. doi: 10.13394/j.cnki.jgszz.2021.0106
Citation: ZHANG Liang, GUO Xipeng, WANG Dingwen, XU Wen, LIU Jian, HUANG Shuai, YIN Shaohui. On-machine measurement and compensation machining for ultra-precision cutting of optical aspheric surface[J]. Diamond &Abrasives Engineering, 2022, 42(1): 18-22. doi: 10.13394/j.cnki.jgszz.2021.0106

光学非球面超精密切削的在位测量及补偿加工

doi: 10.13394/j.cnki.jgszz.2021.0106
基金项目: 国家重点研发计划(2017YFE0116900);国家自然科学基金(52130503);湖南省重点研发项目(2020WK2011)。
详细信息
    通讯作者:

    尹韶辉,男, 1967年生,教授、博士生导师。主要研究方向:超精密加工、微纳制造、特种加工智能制造技术。E-mail: yinshaohui@hnu.edu.cn

  • 中图分类号: TG58;TQ164

On-machine measurement and compensation machining for ultra-precision cutting of optical aspheric surface

  • 摘要: 开发一种采用接触式测头与电容式位移传感器相结合的在位测量装置及非球面测量与补偿加工软件,进行C3604黄铜球面及非球面的单点金刚石超精密切削加工,并开展在位测量及补偿加工试验。补偿加工后,经在位测量系统测量,球面面形精度PV达到231.4 nm,非球面面形精度PV达到206.3 nm;与离线测量结果比对,结果分别相差3.0 nm和7.0 nm,验证了在位测量系统测量的精确性和补偿加工的有效性。

     

  • 图  1  在位测量装置

    Figure  1.  On-machine measurement device

    图  2  超精密五轴复合加工机床

    Figure  2.  Ultra-precision 5-axis compound machining machine

    图  3  黄铜球面车削形状误差曲线测量结果

    Figure  3.  Measurement results of brass spherical turning form error curve

    图  4  C3604黄铜球面外观图

    Figure  4.  C3604 brass sphere

    图  5  表面微观形貌

    Figure  5.  Surface morphology

    图  6  黄铜非球面车削形状误差曲线测量结果

    Figure  6.  Measurement results of brass aspheric surface turning form error curve

    图  7  C3604黄铜非球面外观图

    Figure  7.  C3604 brass asphere

    图  8  表面微观形貌

    Figure  8.  Surface morphology

    表  1  车削加工试验条件

    Table  1.   Experimental conditions for turning


    参数名称
    数值
    粗加工精加工、补偿加工
    工件转速 n / (r∙min−1800800
    进给速度 vf / (mm∙min−162
    切入量 a / μm41
    加工步距 l / μm11
    下载: 导出CSV

    表  2  非球面系数

    Table  2.   Asphere coefficients

    系数数值
    R−40
    A2−8.534 237×10−5
    A6−6.340 824×10−5
    K−0.519 528
    A4−8.680 571×10−7
    A8−2.696 312×10−11
    下载: 导出CSV
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出版历程
  • 录用日期:  2022-12-20
  • 收稿日期:  2021-11-17
  • 修回日期:  2022-12-10
  • 网络出版日期:  2022-03-17

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