Wear properties of HFCVD diamond films on SiC substrate
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摘要: 利用热丝化学气相沉积技术在碳化硅基底上制备微米金刚石薄膜、纳米金刚石薄膜和金刚石–石墨复合薄膜,采用扫描电子显微镜、原子力显微镜和拉曼光谱仪对不同金刚石薄膜的表面形貌和微观结构进行表征,通过摩擦磨损实验测试金刚石薄膜的摩擦系数并计算其磨损率,对比研究不同种类金刚石薄膜的摩擦磨损性能。结果表明:金刚石–石墨复合薄膜具有较好的摩擦磨损性能,薄膜表面粗糙度为53.8 nm,摩擦系数为0.040,和纳米金刚石薄膜(0.037)相当;金刚石–石墨复合薄膜的磨损率最低,为2.07×10−7 mm3·N−1·m−1。在相同实验条件下,同碳化硅基底的磨损率(9.89×10−5 mm3·N−1·m−1)和摩擦系数(0.580)相比,所有金刚石薄膜的磨损率和摩擦系数均有明显提升,说明在SiC基体表面沉积金刚石薄膜能够显著提高碳化硅材料在摩擦学领域的使役性能。Abstract: Micro-diamond film, nano-diamond film and diamond-graphite composite film were deposited on silicon carbide substrate by hot filament chemical vapor deposition. The surface morphology and phase of the grown diamond films were analyzed using scanning electron microscope, atomic force microscope and Raman spectrometer. The friction coefficient and the wear rate of diamond films were measured by friction experiments. The friction and wear properties of diamond films were studied by comparing the experimental results. The results show that the diamond-graphite composite film has better friction and wear properties, the surface roughness of which is 53.8 nm. The friction coefficient (0.040) is similar to that of the nano-diamond film (0.037), while the wear rate is the lowest, 2.07×10−7 mm3·N−1·m−1. Compared with those of SiC substrate, the wear rate (9.89×10−5 mm3·N−1·m−1) and the friction coefficient (0.580) of the diamond films have been greatly improved, which indicates that depositing diamond on the surface of SiC substrate significantly improves the performance of the silicon carbide in the field of friction.
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Key words:
- diamond film /
- silicon carbide /
- graphite /
- friction and wear /
- hot filament chemical vapor deposition
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表 1 金刚石薄膜沉积参数
Table 1. Deposition parameters of diamond film
参数 MCD NCD D/GC 甲烷流量 VM /sccm① 4 20 20 基底温度 θs / ℃ 930±10 860±10 930±10 热丝数量 n 6 6 6 热丝直径 df / mm 0.5 0.5 0.5 热丝–基底间距 d / mm 8 8 8 腔室气压 p / Pa 1000 1000 1000 热丝温度 θf / oC 2600±50 2600±50 2600±50 沉积时间 t / h 3 3 3 氢气流量 VH /sccm 400 400 400 注:① sccm为体积流量单位(standard cubic centimeter per minute), 表示每分钟流过的标准状况下的气体体积(以cm3计)。 -
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