旋转电弧加热在环状工件内壁沉积金刚石涂层

李国华; 崔玉明; 董旺; 姜龙

doi:10.13394/j.cnki.jgszz.2021.0103

旋转电弧加热在环状工件内壁沉积金刚石涂层

doi: 10.13394/j.cnki.jgszz.2021.0103

李国华^1,,
崔玉明¹,
董旺¹,
姜龙^{1, 2, ,}

1.
河北普莱斯曼金刚石科技有限公司，石家庄 050081
2.
河北省激光研究所，石家庄 050081

详细信息

作者简介:
李国华，男，1946年生，研究员。主要研究方向：电弧等离子体的应用。E-mail: liguohua@hediamond.cn

通讯作者:
姜龙，男，1976年生，副研究员。主要研究方向：CVD金刚石制备、检测及应用。E-mail: jianglong@hediamond.cn

中图分类号: TQ164
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出版历程
- 收稿日期: 2020-11-26
- 修回日期: 2021-07-30
- 录用日期: 2021-08-24
- 网络出版日期: 2022-03-17
- 刊出日期: 2022-03-17

Diamond coating deposited on the inner wall of annular workpiece by rotating arc heating

LI Guohua^1
,,
CUI Yuming¹,
DONG Wang¹,
JIANG Long^{1, 2
, ,}

1.
Hebei Plasma Diamond Technology Co., Ltd., Shijiazhuang 050081, China
2.
Hebei Institute of Laser, Shijiazhuang 050081, China

摘要

摘要: 为实现在大口径环状工件内壁沉积金刚石涂层，研制一种能够产生旋转电弧的分体式等离子炬。利用活动阳极形成的伞状电弧帽，改变平行于轴且向下吹的工作气体旋转电离的方向，使其垂直吹向环状工件内壁。测试不同阳极直径下电弧的工作参数，并用相机拍摄相应的电弧形貌。进行金刚石涂层沉积试验，在内径为180 mm的硬质合金拉拔模具和内径为100 mm的石墨内表面沉积出高质量的金刚石涂层。利用拉曼光谱仪和扫描电镜对涂层的成分、表面形貌等进行测试分析。已沉积金刚石涂层的硬质合金模具成功应用于超高压电缆铝护套的拉拔设备中。
- 等离子炬 /
- 旋转电弧 /
- 环状工件 /
- 金刚石涂层
Abstract: A plasma torch with split anode and rotating arc was developed. The diamond was coated on the inner wall of large diameter annular workpiece by the torch. The umbrella-like arc formed by the movable anode makes the axial working gas blow vertically to the inner wall of the annular workpiece. The parameters of arc under different anode diameters were tested, and the arc shap was taken by camera. High quality diamond coatings were successfully deposited on the inner surface of cemented carbide drawing die with inner diameter of 180 mm and graphite with inner diameter of 100 mm. The composition and surface morphologies of the coating were analyzed by Raman spectroscopy and scanning electron microscopy. The diamond coating cemented carbide die has been successfully applied in the drawing equipment of aluminum sheath of extra-high voltage cable.
- plasma torch /
- rotating arc /
- annular workpiece /
- diamond coating

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图 1 分体式等离子炬结构及工作原理示意图

Figure 1. Schematic diagram of structure and working principle of split plasma torch

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图 2 旋转电弧原理图

Figure 2. Schematic diagram of rotating arc

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图 3 不同直径阳极对应的旋转电弧照片

Figure 3. Photo of rotating arc corresponding to anodes with different diameters

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图 4 金刚石涂层实物样品照片

Figure 4. Photos of diamond coating samples

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图 5 2种样品不同位置金刚石涂层的拉曼光谱图

Figure 5. Raman spectra of diamond coatings in different positions of two samples

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图 6 2种样品不同位置金刚石涂层的形貌图

Figure 6. Morphologies of diamond coating in different positions of two samples

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表 1 不同直径阳极电弧工作参数表

Table 1. Working parameters of anode arc with different diameters

阳极直径 d mm	引弧电极氩气流量${Q_{{\rm{A}}{{\rm{r}}_1}}} $ L/min	辅助电极内侧氩气流量${Q_{{\rm{A}}{{\rm{r}}_2}}} $ L/min	氢气流量${Q_{{\rm{H}}{_2}}} $ L/min	甲烷流量 ${Q_{{\rm{C}}{{\rm{H}}_4}}} $ mL/min	腔压 p kPa	磁场电流 I₁ A	工作电流 I₂ A	工作电压 U V
60	2.5	3	6	0	3.0	2.6	115	80
100	3.0	3	10	200	3.5	3.0	150	90
120	3.0	4	10	0	3.5	3.0	150	95

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表 2 金刚石涂层沉积参数

Table 2. Diamond coating deposition parameters

样品	引弧电极氩气流量${Q_{{\rm{A}}{{\rm{r}}_1}}} $ L/min	辅助电极内侧氩气流量${Q_{{\rm{A}}{{\rm{r}}_2}}} $ L/min	氢气流量${Q_{{\rm{H}}{_2}}} $ L/min	甲烷流量 ${Q_{{\rm{C}}{{\rm{H}}_4}}} $ L/min	沉积温度θ ℃	沉积时间t h	沉积厚度D μm
硬质合金	4.0	4	10	200	830	30	35~40
石墨	2.5	3	6	120	850	24	45~50

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参考文献(9)

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